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    Basic elements

    Cleanroom Design Flow Chart

     Process Layout Approach

     

     Parts of the Cleanroom

    FAB Clean Room

    HVAC

    Make-UP Air, Recirculation Air, Temp & RH Control, Exhaust, Diff Pressure, Chilled Water, Steam Sytem, Air Velocity, Air Change Rate

    Archi

    Raised Floor, EQ Layout, Vibration, Partion, Static Elec, Magnetic Interference

    Land

    Soil Drilling, Soil Analysis, Vibration Meas

    Public Utility

    City Water, Power System, Road Transportation, Gas Line

    Environment

    Clean Room Management, House Keeping, Air Shower, Noise Control

    Safety

    Fire Alarm, Gas Detection, Safety Corridor, Fire Wall, Emergency Shower, Paging, Communication, Breathing Air

    Power

    High Tension Power, EQ Power, Lighting Power, Emergency Power, UPS

    Facility

    Supply, Chemical Disgense, Gas Supply, Process Cooling Water, Drain, Waste Water Treat, Waste Reclaim, Plant Vacuum

     

    Cleanroom features

    Environment Conditions

    Cleanliness, Temperature, Humidity, Pressure, Vibration, Noise, Easy to Clean and No Smell

    Flexible Space

    Static Elimination, Monitoring System, Standardized Cleaning, Rationalization Moving Lines

    Prevention for Public Hazard & Disaster

    Exhaust Gas Treatments Equipment, Wastewater Treatments Equipment, Poison Gas Dilution System, Noise Prevention and Countermeasures, Easy to Maintain, Evacuation Path Signal Board, Fire System, Emergency Shower, Eyewash System, Toxic Gas Detection System, Shockpro of Countermeasures

    Continuous Opetation

    Back-up System, Power Failure Protection Equipment, Central Monitoring System, Energy Saving Plan

     

    Basic Consideration of Cleanroom

    Basic Consideration

    Problems

    Environment

    Base Size Too Small, Environmental Regulation, Factory Exhaust

    Transport

    Distance from The Highway, Distance From the Airport and Por, Distance from The Materials Supplier

    Natural Condition

     Temperature and Humidity, Raining and Snowing, The Wind from Beach Side, Earthquake

    Cleanliness Class

    Why Need A Cleanroom, The Most Suitable Level, Temperature and Humidity Requirement, Vibration, Noise, Electromagnetic

    Export

    Location of Factory, Scalability of Equipment, Size Based on Demand, Operation Safety

    Hydropower

    Quality of The Water, The Capacity of Water & Electrical Supply, Supply Source Distance, Voltage Magnitude

    Move In Plan

    Staff & Equipment, Appropriate Structure, Emergency Plan

    Staff

     Manpower, Engineer, Education, Health Care and Culture

     
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